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Titre
Determination of deposited flux and energy of sputtered tungsten atoms on every stages of transport in HiPIMS discharge
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BSO - Titre
Determination of deposited flux and energy of sputtered tungsten atoms on every stages of transport in HiPIMS discharge
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DOI
DOI
10.1088/1361-6595/26/2/025003
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DOAI
DOAI
10.1088/1361-6595/26/2/025003
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Identifiant WoS
WOS:000391592500003
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Accès ouvert
OA - Non
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Source - Accès ouvert
OA - Non
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Type d'accès
Non OA
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Editeur
IOP Publishing
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Source
PLASMA SOURCES SCIENCE & TECHNOLOGY
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ISSN
0963-0252
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Type de document
Article
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Notoriété
4 - Excellente
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CNRS
Oui
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CNRS - Institut
INC - Institut de chimie
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uid:/8J05LC80
12/10/2021 14:52:34 (latest)
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